Equipment Training

Lithography
Equipment Contact Manual Training Video Quiz Minimum Number of Sessions Approx. Session Duration (Hrs)
Brewer Photoresist Spinners 1 & 2 Siwei Li Manual Video 1 0.5
CEE 100 Spinner Siwei Li Manual 1 .5
EVG 620-mask aligner Siwei Li Manual Video 2 1
GCA 8500 i-line Stepper Siwei Li Manual Video 3 1
Karl Suss MA4-1 and MA4-2 Siwei Li Manual Video 2 1
NPGS Electron Beam Lithography Ryan Anderson 3 2
Solitec Photoresist Spinner 1 & 2 Siwei Li Manual 1 .5
Etch
Equipment Contact Manual Training Video Quiz Minimum Number of Sessions Approx. Session Duration (Hrs)
DPSS Laser Ryan Anderson Manual 2 1
Idonus HF Vapor Etch Ryan Anderson 1 .5
Plasma Equip. Tech. Services (PETS) RIE Ryan Anderson Manual-TBA Video 2 .5
PlasmaTherm Apex SLR RIE Ryan Anderson Manual 1 1
PlasmaTherm Apex SLR RIE/ICP Ryan Anderson Manual 1 1
PlasmaTherm Versaline Deep Silicon Etcher Ryan Anderson Manual 2 1
PlasmaTherm Vision 320 RIE Ryan Anderson Manual 1 1
Xactix XeF2 Etcher Ryan Anderson Manual 2 .5
Yield Engineering Systems G500 O2/Ar Plasma Etcher Ryan Anderson Manual 1 1
Thin Film Deposition
Equipment Contact Manual Training Video Quiz Minimum Number of Sessions Approx. Session Duration (Hrs)
CHA E-beam Evaporator Dr Chan Ho Kim Manual Quiz 2 3.5
Lesker Labline Sputter System Dr Chan Ho Kim Manual Quiz 2 3.5
Picosun R-200 Plasma Enhanced ALD Ryan Anderson Manual 2 2
PlasmaTherm Versaline HDPCVD Dr Chan Ho Kim Manual Quiz 2 2
PlasmaTherm Vision 310 PECVD Dr Chan Ho Kim Manual Quiz 2 1
Quorum Tech Q150RES Gold/Carbon Sputter Coater Ryan Anderson Manual 1 .5
Metrology
Equipment Contact Manual Training Video Quiz Minimum Number of Sessions Approx. Session Duration (Hrs)
4 point probe Siwei Li Video 1 .5
Bruker Dektak XT Ryan Anderson Manual 1 1
Dektak 3ST Ryan Anderson Manual 1 1
HP 4155A Semiconductor Parameter Analyzer and Probe Station Siwei Li 1 1
J.A. Woollam M-2000 Ellipsometer Dr Chan Ho Kim Manual 1 1.5
Nanometrics Nanospec Ryan Anderson Manual 1 .5
Microscopy and Analysis
Equipment Contact Manual Training Video Quiz Minimum Number of Sessions Approx. Session Duration (Hrs)
Carl Zeiss Axiotron Microscope Siwei Li Manual Video 1 .5
FEI Nova NanoSEM 430 Ryan Anderson Manual 3 1
FEI Scios Dual Beam FIB/SEM Dr Andrew Thron 2 2
Nikon TMS Infrared Microscope Siwei Li
Oxford EDS and EBSD Dr Andrew Thron Manual 2 2
Cleaning and Preparation
Equipment Contact Manual Training Video Quiz Minimum Number of Sessions Approx. Session Duration (Hrs)
Nitrogen Glove Box Siwei Li
Semitool Spin Rinsers Siwei Li 1 .5
Ultra T SCSx124 Substrate Cleaning System Siwei Li 1 1
Packaging
Equipment Contact Manual Training Video Quiz Minimum Number of Sessions Approx. Session Duration (Hrs)
Disco DAD 321 Dicing Saw Dr Chan Ho Kim Manual Quiz 2 3
EVG 501 Wafer Bonder Siwei Li Manual Video 1 .5
EVG 810 Plasma Activation Siwei Li Manual Video 1 .5
Nordson DAGE 4000 Bond Tester System Siwei Li Manual 1 1
Tousimis AutoSamdri 815 Critical Point Dryer Siwei Li Manual 1 .5
West Bond 7700E Ball Bonder Ryan Anderson Manual 2 0.5
Thermal Processing
Equipment Contact Manual Training Video Quiz Minimum Number of Sessions Approx. Session Duration (Hrs)
Allwin AW610 Rapid Thermal Processor Dr Chan Ho Kim Manual 1 1.5
Annealsys As-One RTP Dr Chan Ho Kim Manual 1 2
Programmable Oven Siwei Li Manual 1 .5