Lithography
Equipment Contact Manual Training Video Quiz Minimum Number of Sessions Approx. Session Duration (Hrs)
Brewer Photoresist Spinners 1 & 2 Dr. Siwei Li Manual Video 1 0.5
CEE 100 Spinner Dr. Siwei Li Manual 1 .5
EVG 620-mask aligner Dr. Siwei Li Manual Video 2 1
GCA 8500 i-line Stepper Dr. Siwei Li Manual Video 3 1
Karl Suss MA4-1 and MA4-2 Dr. Siwei Li Manual Video 2 1
NPGS Electron Beam Lithography Ryan Anderson 3 2
Sky 335R6 Heated-Roller Laminator Dr. Siwei Li 1 0.5
Solitec Photoresist Spinner 1 & 2 Dr. Siwei Li Manual 1 .5
Etch
Equipment Contact Manual Training Video Quiz Minimum Number of Sessions Approx. Session Duration (Hrs)
DPSS Laser Dr. Vishal Narang Manual 2 1
Idonus HF Vapor Etch Dr. Vishal Narang 1 .5
IntlVac Nanoquest IBE/RIBE/CAIBE Dr. Vishal Narang Manual 3 2
Plasma Equip. Tech. Services (PETS) RIE Dr. Vishal Narang Manual Video 2 .5
PlasmaTherm Apex SLR RIE Dr. Vishal Narang Manual 1 1
PlasmaTherm Apex SLR RIE/ICP Dr. Vishal Narang Manual 1 1
PlasmaTherm Versaline Deep Silicon Etcher Dr. Vishal Narang Manual 2 1
PlasmaTherm Vision 320 RIE Dr. Vishal Narang Manual 1 1
Xactix XeF2 Etcher Dr. Vishal Narang Manual 2 .5
Yield Engineering Systems G500 O2/Ar Plasma Etcher Dr. Vishal Narang Manual 1 1
Thin Film Deposition
Equipment Contact Manual Training Video Quiz Minimum Number of Sessions Approx. Session Duration (Hrs)
CHA E-beam Evaporator Dr. Chan Ho Kim Manual Quiz 2 3.5
IntlVac Nanochrome I Ebeam/Thermal Evaporator Dr. Chan Ho Kim Manual 2 3.5
Lesker Labline Sputter System Dr. Chan Ho Kim Manual Quiz 2 3.5
Picosun R-200 Plasma Enhanced ALD Dr. Vishal Narang Manual 2 2
PlasmaTherm Versaline HDPCVD Dr. Chan Ho Kim Manual Quiz 2 2.5
PlasmaTherm Vision 310 PECVD Dr. Chan Ho Kim Manual Quiz 2 1.5
Quorum Tech Q150RES Gold/Carbon Sputter Coater Ryan Anderson Manual 1 .5
Metrology
Equipment Contact Manual Training Video Quiz Minimum Number of Sessions Approx. Session Duration (Hrs)
4 point probe Dr. Siwei Li Video 1 .5
Bruker Dektak XT Dr. Vishal Narang Manual 1 1
HP 4155A Semiconductor Parameter Analyzer and Probe Station Dr. Siwei Li Manual 1 1
J.A. Woollam M-2000 Ellipsometer Dr. Chan Ho Kim Manual 1 1.5
Nanometrics Nanospec Dr. Siwei Li Manual 1 .5
Microscopy and Analysis
Equipment Contact Manual Training Video Quiz Minimum Number of Sessions Approx. Session Duration (Hrs)
Carl Zeiss Axiotron Microscope Dr. Siwei Li Manual Video 1 .5
FEI Nova NanoSEM 430 Ryan Anderson Manual 3 1
FEI Scios Dual Beam FIB/SEM Dr. Andrew Sharits Manual 3 1.5
Nikon TMS Infrared Microscope Dr. Siwei Li
Oxford EDS and EBSD Dr. Andrew Sharits Manual 2 2
Cleaning and Preparation
Equipment Contact Manual Training Video Quiz Minimum Number of Sessions Approx. Session Duration (Hrs)
Nitrogen Glove Box Dr. Siwei Li
Nova Scan Technologies UV Ozone Cleaner Dr. Siwei Li Manual 1 0.5
Semitool Spin Rinsers Dr. Siwei Li 1 .5
Ultra T SCSx124 Substrate Cleaning System Dr. Siwei Li Manual 1 1
Packaging
Equipment Contact Manual Training Video Quiz Minimum Number of Sessions Approx. Session Duration (Hrs)
Disco DAD 321 Dicing Saw Dr. Chan Ho Kim Manual Quiz 2 3
EVG 501 Wafer Bonder Dr. Siwei Li Manual Video 1 .5
EVG 810 Plasma Activation Dr. Siwei Li Manual Video 1 .5
Nordson DAGE 4000 Bond Tester System Dr. Siwei Li Manual 1 1
Tousimis AutoSamdri 815 Critical Point Dryer Dr. Siwei Li Manual 1 .5
West Bond 7700E Ball Bonder Ryan Anderson Manual 2 0.5
Thermal Processing
Equipment Contact Manual Training Video Quiz Minimum Number of Sessions Approx. Session Duration (Hrs)
Allwin AW610 Rapid Thermal Processor Dr. Chan Ho Kim Manual 1 1.5
Annealsys As-One RTP Dr. Chan Ho Kim Manual 1 2
Programmable Oven Dr. Siwei Li Manual 1 .5