FEI Scios Dual Beam FIB/SEM


The FEI Scios DualBeam FIB/SEM is a powerful analytical tool used to obtain a variety of data from inside the sample in three dimensions. Users can switch between the two beams for quick and accurate navigation and milling with minimal specimen preparation. Convergence of the SEM and FIB at a short working distance allows precision “slice-and-view” cross-sectioning,  analysis at high resolution, and  X-ray microanalysis.

Capabilities include:

-Imaging detectors: ETD, ICE, CBS, STEM, EBSD, T1, T2, T3
-FIB milling and cross-sectioning
-Easy-lift manipulator needle for TEM lift-outs
-Oxford X-Max Energy Dispersive X-ray Spectroscopy (EDS) Detector
-Oxford Aztec EDS software
-Oxford NordylsNano Electron Back Scatter Diffraction (EBSD) detector
-Gas Injection Systems for patterned deposition of Carbon and Tungsten
-Slice and View software
-Plasma cleaner
-Controls interfaced with the software to optimize imaging, post-processing, and sample navigation