The Nikon TMS is manually-operated inverted microscope that has been modified to allow the visualization of IR light. IR light is 100% transmissible through silicon, giving users the ability to see the etching between two bonded wafers. This unit has the following magnification options: 4x, 10x, and 20x. The specimen holder can hold 100 mm wafers and give users the ability to finely translate their wafers in the x-y plane.
Nikon TMS Infrared Microscope