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Center for Nano-MicroManufacturing
Center for Nano-MicroManufacturing
Providing researchers with micro-nanofabrication technologies, processes, and services
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About Us
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Location
Directory
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Member Information
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Internal UC Access Procedure
External Non UC Access Procedure
Internal UC Usage Rates
External Non UC Usage Rates
Getting Started with Badger
Service Request Procedures
Safety
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CNM2 SDS/SOP Table
Submit Personal Chemical Request
Cleanroom Map
Report an Incident
Equipment
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Lithography
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GCA 8500 i-line Stepper
EVG 620-mask aligner
Karl Suss MA4 1 & 2
Brewer Photoresist Spinners 1 & 2
Solitec Photoresist Spinners 1 & 2
Brewer Spinner
NPGS Electron Beam Lithography
Etch
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PlasmaTherm Apex SLR RIE/ICP
PlasmaTherm Apex SLR RIE
PlasmaTherm Versaline DSE
PlasmaTherm Vision 320 RIE
Xactix XeF2 Etcher
PETS RIE
DPSS Laser
Idonus HF Vapor Etch
Thin Film Deposition
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CHA E-beam Evaporator
Lesker Labline Sputter System
Picosun R-200 PEALD
PlasmaTherm Versaline HDPECVD
PlasmaTherm Vision 310 PECVD
Quorum Tech Gold/Carbon Sputter Coater
Metrology
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J.A. Woollam M-2000 Ellipsometer
Bruker Dektak XT
Nanometrics Nanospec
4 point probe
Dektak 3ST
HP 4155A and Probe Station
Microscopy and Analysis
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FEI Scios Dualbeam FIB/SEM
FEI Nova NanoSEM 430
Nikon TMS Infrared Microscope
Carl Zeiss Axiotron Microscope
Cleaning and Preparation
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Nitrogen Glove Box
Semitool Spin Rinseres
Packaging
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EVG 501 Wafer Bonder
EVG 810 Plasma Activation
Disco DAD 321 Dicing Saw
Tousimis AutoSamdri 815 Critical Point Dryer
Thermal
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Allwin AW610 Rapid Thermal Processor
Annealsys As-One RTP
Programmable Oven
Training
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General Training and Short Courses
Equipment Training
Process
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Materials Provided
Process Notes
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UC Davis
Welcome to CNM2
Providing Researchers with Micro-Nanofabrication technologies, processes, and services
