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Center for Nano-MicroManufacturing
Center for Nano-MicroManufacturing
Providing researchers with micro-nanofabrication technologies, processes, and services
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About Us
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Location
Directory
Cleanroom Video Tour
Membership Information
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Internal UC Access Procedure
External Non UC Access Procedure
Internal UC Usage Rates
External Non UC Usage Rates
Other Academic Institution Usage Rates
Getting Started with Badger
Service Request Procedures
Safety
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SDS/SOP Table
CNM2 Policies and Procedures
Chemical Directory
Request approval of non-stock chemical
Cleanroom Map
Report an Incident
Equipment
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Lithography
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GCA 8500 i-line Stepper
EVG 620-mask aligner
Karl Suss MA4 1 & 2
Brewer Photoresist Spinners 1 & 2
Solitec Photoresist Spinners 1 & 2
CEE 100 Spinner
NPGS Electron Beam Lithography
Etch
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PlasmaTherm Apex SLR RIE/ICP
PlasmaTherm Apex SLR RIE
PlasmaTherm Versaline DSE
PlasmaTherm Vision 320 RIE
Xactix XeF2 Etcher
PETS RIE
DPSS Laser
Idonus HF Vapor Etch
Yield Engineering Systems G500 O2 Plasma Etcher
Thin Film Deposition
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CHA E-beam Evaporator
Lesker Labline Sputter System
Picosun R-200 PEALD
PlasmaTherm Versaline HDPCVD
PlasmaTherm Vision 310 PECVD
Quorum Tech Gold/Carbon Sputter Coater
Metrology
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J.A. Woollam M-2000 Ellipsometer
Bruker Dektak XT
Nanometrics Nanospec
4 point probe
Dektak 3ST
HP 4155A and Probe Station
Microscopy and Analysis
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FEI Scios Dualbeam FIB/SEM
FEI Nova NanoSEM 430
Nikon TMS Infrared Microscope
Carl Zeiss Axiotron Microscope
Cleaning and Preparation
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Nitrogen Glove Box
Semitool Spin Rinseres
Ultra T SCSx124 Substrate Cleaning System
Packaging
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EVG 501 Wafer Bonder
EVG 810 Plasma Activation
Disco DAD 321 Dicing Saw
Tousimis AutoSamdri 815 Critical Point Dryer
Nordson DAGE 4000 Bond Tester System
West Bond 7700E Wire Bonder
Thermal Processing
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Allwin AW610 Rapid Thermal Processor
Annealsys As-One RTP
Programmable Oven
Training
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Equipment Basic Training
Equipment Specialized Training
General Training and Short Courses
Process
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Photoresists Provided
Photoresist Baseline Recipes
Process Monitors
Materials Provided
General Chemicals Provided
Process Notes
Contact Us
Quick Links
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UC Davis
Welcome to CNM2
Providing Researchers with Micro-Nanofabrication technologies, processes, and services
