Location
1249
The Scios is a combination of a Scanning Electron Microscope (SEM) and a Focused Ion Beam (FIB) system. The integration of both systems yields a powerful analytical tool for obtaining any data from any sample in three dimensions. Energy Dispersive Spectroscopy (EDS) Analysis provides qualitative elemental (Be to Cf) and chemical microanalysis. The Scios is equipped with the X-MaxN 50mm2 EDS system to measure sub-surface (0.3-3um) with a detection limit of ~1 atom %. Schematic of system as it relates to the components of the Scios.