The Dektak XT is a 2D contact profilometer used to provide quantitative information about step heights and surface roughness for thin and thick films measurements. This information is collected and analyzed in the Vision 64 application software. This machine works well with a wide range of materials except for those that are very soft or break under small amounts of force. It provides a measurements across a wide range of vertical features (up to 1 mm) with high resolution (~.5nm). The operation of the tool is simplified with the Vision64 software. The Vision64 application calculates and displays the results of user-selected analytical functions for measuring, step height, surface texture, and other parameters to characterize the profile data.