| PlasmaTherm Vision 320 RIE |
1224B2 |
Dr. Vishal Narang |
| IntlVac Nanoquest IBE/RIBE/CAIBE |
1224A2 |
Dr. Vishal Narang |
| PlasmaTherm Apex SLR RIE/ICP |
1224B2 |
Dr. Vishal Narang |
| PlasmaTherm Apex SLR RIE |
1224B2 |
Dr. Vishal Narang |
| PlasmaTherm Versaline Deep Silicon Etcher |
1224A6 |
Dr. Vishal Narang |
| Xactix XeF2 Etcher |
1224B2 |
Dr. Vishal Narang |
| Yield Engineering Systems G500 O2/Ar Plasma Etcher |
1224A6 |
Dr. Vishal Narang |
| Plasma Equip. Tech. Services (PETS) RIE |
1224A6 |
Dr. Vishal Narang |
