Rudolph Elipsometer

Elipsometer 2Model: EL2

Manufacturer: Rudolph

Location: 1224A3

RATES | Operation Manual

Capable of performing ellipsometric measurements at a  wavelength of 633nm, the Rudolph Ellipsometer EL2 is a microprocessor-controlled automatic ellipsometer that  measures film thickness. This instrument computes the DELTA and PSI of single layer thin  films while the external computer converts those parameters into measured film thickness  and refractive index. Based on the capability of the current computer program, only the  thickness and refractive index of homogenous and transparent thin films can be obtained.

An alternative to the EL2 is the easy-to-use Nanospectrometer.