Other Academic Institution Usage Rates

Other Academic Institution and DART Program Members Usage, Training and Service Rates


The following rates include campus overhead (33.7%).  Rates are subject to change.

Cleanroom access $26.74/hr
Staff Services (Equipment usage time will be added to staff service rate) $77.55/hr

Equipment Training

Cleanroom Equipment Training

Microscopy Lab Equipment Training

  • FEI Nova NanoSEM 430 Training and Staff Services
  • FEI Scios Dualbeam FIBSEM Training and Staff Services

 

 

 

 

 

 

$152/hr
$137/hr

Precious metals Purchase price per gram
Lithography Equipment  
Brewer1
Brewer2
Solitec1
Solitec2
KSuss_MA4-1
KSuss_MA4-2
EVG 620 Mask_Bond Aligner
GCA 8500 I-Line Wafer Stepper

$13.37/hr
$13.37/hr
$24.10/hr
$24.10/hr
$33.43/hr
$33.43/hr
$53.48/hr
$53.48/hr

Deposition Equipment  

CHA AutoTech II Ebeam Evaporator
Lesker Labline Sputter
Advanced Vacuum Vision 310 PECVD
PlasmaTherm Versaline HDPECVD
PicoSun R-200 ALD

$40.11/hr
$40.11/hr
$53.48/hr
$53.48/hr
$53.48/hr

Etching Equipment  
DPSS UV Laser
Plasma Equipment Tech (PETS) RIE
Yield Engineering Systems G500 O2/Ar Plasma Etcher
SPTS Xactix XeF2 e1
Advanced Vacuum Vision 320 RIE
PlasmaTherm Versaline Deep Si Etcher
Advanced Vacuum Apex SLR RIE
Advanced Vacuum Apex SLR RIE/ICP
$33.43/hr
$26.74/hr
$26.74/hr
$66.58/hr
$53.48/hr
$53.48/hr
$53.48/hr
$53.48/hr
Analytical Equipment  
Dektak_3030
Bruker Dektak XT
J.A. Woollam M-2000 Ellipsometer
Nanometrics Nanospec AFT
$24.10/hr
$33.43/hr
$26.74/hr
$24.10/hr
Thermal Process Equipment  
Annealsys AS-One RTP
Yamatio Scientific America DP63 Programmable Oven
Allwin AW610 Rapid Thermal Processor
$53.48/hr
$0/hr
$53.48/hr
Cleaning and Preparation Equipment  
Semitool PSC-101 Spin Rinse Dryer
Ultra T SCSx124 Substrate Cleaning System
$1.34/hr
$13.37/hr
Packaging Equipment  
Disco DAD 321 Dicing Saw
West Bond 7700E Wire Bonder
EVG 501 Bonder
EVG 810 Plasma Activation
Tousimis Autosamdri 815 Critical point dryer
Nordson DAGE 4000 Bond Tester System

$40.11/hr
$40.11/hr
$66.85/hr
$80.22/hr
$53.48/hr
$13.37/hr

Microscopy Lab                

FEI Nova NanoSEM 430 (SEM or EBL)
FEI Scios Dualbeam FIBSEM
Quorum Tech Q150RES Sputter Coater

$102/hr
$75/hr
$0/hr