Fast and easy to learn, the Nanometrics "Nanospec" Reflectometer can determine the thickness and refractive index of a thin film. The most common applications are measuring the thickness of photoresist, Silicon Oxide or Silicon Nitride. It also has surprisingly good precision determining the refractive index of a film, even with unknown thickness. Alternatives for determining thin film thickness include the Dektak IIA, the FEI SEM and the Rudolph Elipsometer.
Nanometrics ReflectometerModel: Manufacturer: NanometricsLocation: 1224A3RATES | Operation Manual