LAM AutoEtch

IMG_20130607_100908Model: AutoEtch 490

Manufacturer: LAM

Location: 1224B3

RATES | Operation Manual

The Lam AutoEtch 490 is an automated plasma etching system for polysilicon, refractory metal silicides and nitrides. It processes single 4"-6" wafers with wafer alignment capabilities and a built in wafer transport mechanism to allow for continuous operation. This etcher uses an computer controlled operator interface that runs the system, executes recipes and warns of hazards/malfunctions during operation.

An alternative to the LAM is the Acatel DRIE, which has increased etching capabilities but is more limited in the materials it can etch.