Karl Suss MA56

KarlSuss MA56 2Model: MA56

Manufacturer: Karl Suss

Location: 1274

RATES | Operation Manual 

The Karl Suss MA56 is a mask alignment and exposure system which offers mass production capabilities for cassette to cassette handling of up to 4" wafers and 5" masks, though smaller wafers and chips may be mounted to a 4" carrier wafer and processed. The microscope has dual alignment objectives and split-field viewing.  The mask and microscope have motorized motion in x and y, and they may be moved together or independently over the stationary wafer.

The alternatives are the EVG, Karl Suss MA4, and Canons.