Hummer Sputterer

hummer x mix

Model: Hummer X

Manufacturer: Anatech LTD

Location: 1246

RATES | Operation Manual

Used as a support tool for the FEI Nova NanoSEM430, the Hummer Sputter deposits nanometer thin metal films onto otherwise insulating samples to increase their SEM contrast and decrease charging effects. It is primarily used to deposit AuPd or Al. Though seldom useful for SEM, the Hummer Sputter can also be used for brief reverse sputter etches.

Alternatives for depositing thin conductive coatings include the CHA E-beam Evaporator and the Lesker Sputter.