EVG 420 Aligner

EVG 420Model: EV420

Manufacturer: EVG

Loacation: 1224A7

RATES | Operation Manual

Setup for topside and backside alignment, the EVG 420 is capable of processing samples from small chips  to 4" diameter wafers. The EVG 420 has  soft, hard, vacuum, and proximity contact exposure modes. This mask aligner holds 5" Masks and has a sub-micron exposure resolution. To enhance alignment and feature resolution, the entire system is on a vibration isolation table.

Possible alternatives to the EVG 420 include the Karl Suss MA4 and MA56 aligners and the Canon PLA Aligners.