Woollam EllipsometerWoollam EllipsometerModel: M-2000DManufacturer: J.A. WoollamRATES | Operation Manual 

The Woollam M2000 is a spectroscopic ellipsometer used to characterize optically transparent films. The system has the Near IR upgrade that covers 700 wavelengths from 193nm to 1690nm. Ellipsometry measures the complex reflectance ratio, which is the change in the amplitude ratio (Ψ) and phase change (Δ) of polarized light reflected from the sample surface. The CompleteEASE software use the measured data and the prebuilt models to extract the thickness and optical parameters of the sample. The M2000 is an extremely capable system. The extent of its measurement capabilities is beyond the scope of the operating procedure. More, comprehensive information regarding ellipsometry and the M2000 is available on the JA Woollam web site (www.jawoollam.com). Alternatives for determining thin film thickness include the Dektak IIA and the Dektak XT, the Dektak 3ST, and the Nanometrics Reflectometer.