Dektak 3030 Profilometer

Dektak 3030 4Model: Dektak 3030

Manufacturer: Veeco

Location: 1224A3

RATES | Operation Manual

Dependable for measuring film and feature heights with thickness from 4nm - 120um, the Dektak 3030 Stylus Profilometer doesn’t rely on optical properties in its measurement making it the best choice for very thick, thin, rough or opaque films. It requires a physical well, step or ridge of material to measure thickness, making it somewhat slower than the optical techniques, yet still much faster than SEM.

Close alternatives for measuring thin film thickness include the Nanospec Reflectometer, the Dektak IIA Profilometer, the Rudolph Elipsometer and the FEI SEM.