Brewer Spinner

Brewer SpinnerModel: CEE 100CBManufacturer: Brewer SciencesLocation: 1224A8RATES | Operation Manual

Ideal for thick photoresist deposition, the Brewer Spinner features a fully enclosed vacuum chuck for use with 4” wafers. It offers digital control of ramp rates and multi-step spin processes. It’s adjacent to an 8” Solitec hotplate and a larger precisely-leveled hotplate for use with millimeter-thick lithography. Close alternatives for coating resists include the Solitec Spinner/Hotplates and the SVG 100mm track coater